สถานที่กำเนิด
Shandong, China
requirements
Clean,dry and non-corrosive
gas type
Air,N2,O2,Co2,He,H2,CH4,Ar,etc.
full range1
(0~20, 50, 100, 200, 500) sccm
full range2
(0~1, 5, 10, 50, 100, 200, 500, 800,1000,1200) slm
Accuracy1
0-20sccm... 50slm,1%FS
Accuracy2
0-100/200slm,1.5%FS
Accuracy3
0-50/800/1000/1200slm, 2%FS